LOU Hanyi WANGFuhui JI Lirun ZHANG Lixin Institute of Corrosion and Protection of Metals
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Academia Sinica
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Shenyang
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China LOU Hanyi Associate Professor
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Institute of Corrosion and Protection of Metals
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Academia Sinica
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Shenyang 110015
,
China
金属学报(英文版)
The phase composition of Co-30Cr-6Al-0.5Y coating deposited by planar magnetron sputtering as well as the effect of sputtering parameters on it have been investigated.The sputtered coating is composed of hep ε-phase of fcc α-phase of Co solid solution with a mi- nority of β-CoAl intermetallic phase.The hcp ε-Co phase and the fcc χ-Co phase assumed a <100>and <110>preferred orientation respectively.Both the phase type and orientation extent depend on the sputtering parameters.If the substrate surface is parallel to the target face during sputtering,the coating will be of fine crystallite with compact structure and smooth surface;if it is rotated,the coating will be to the contrary.
关键词:
magnetron sputtering
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